Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11459229 | MMS, MMS array, MEMS actuator and method for providing an MMS | Peter Duerr, Andreas Gehner, Martin Friedrichs | 2022-10-04 |
| 11079411 | Electromechanical component, electromechanical component arrangement, method of detecting a potential difference by using an electromechanical component, and method for performing a functional test on the electromechanical component | Linus Elsäber, Matthias Schulze, Martin Friedrichs, Christoph Hohle | 2021-08-03 |
| 10807859 | MEMS actuator, system having a plurality of MEMS actuators, and method for producing a MEMS actuator | Peter Duerr, Andreas Neudert, Martin Friedrichs | 2020-10-20 |
| 6259550 | Phase-modulating microstructures for highly integrated surface light modulators | Ralf Gottfried-Gottfried, Heinz Kück | 2001-07-10 |