Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12054384 | MEMS comprising a movable structural element, and MEMS array | Peter Duerr | 2024-08-06 |
| 11987491 | MEMS actuator element and MEMS actuator array with a plurality of MEMS actuator elements | Peter DÜRR, Linda Skatulla | 2024-05-21 |
| 10807859 | MEMS actuator, system having a plurality of MEMS actuators, and method for producing a MEMS actuator | Peter Duerr, Detlef Kunze, Martin Friedrichs | 2020-10-20 |