Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11459229 | MMS, MMS array, MEMS actuator and method for providing an MMS | Peter Duerr, Detlef Kunze, Andreas Gehner | 2022-10-04 |
| 11148940 | Microelectromechanical component and method for producing same | Dirk Rudloff, Sebastian Doering, Arnd Huerrich | 2021-10-19 |
| 11079411 | Electromechanical component, electromechanical component arrangement, method of detecting a potential difference by using an electromechanical component, and method for performing a functional test on the electromechanical component | Linus Elsäber, Matthias Schulze, Christoph Hohle, Detlef Kunze | 2021-08-03 |
| 10807859 | MEMS actuator, system having a plurality of MEMS actuators, and method for producing a MEMS actuator | Peter Duerr, Detlef Kunze, Andreas Neudert | 2020-10-20 |
| 7396740 | Method of producing a device with a movable portion | Thor Bakke, Benjamin Völker, Thomas Haase | 2008-07-08 |