Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5914879 | System and method for calculating cluster tool performance metrics using a weighted configuration matrix | Qingsu Wang, Craig W. Christian, John B. Crowley | 1999-06-22 |
| 5418378 | Ion implant device with modulated scan output | Donald L. Friede, Van Le | 1995-05-23 |