| 6051151 |
Apparatus and method of producing a negative ion plasma |
John H. Keller |
2000-04-18 |
| 6028394 |
Cold electron plasma reactive ion etching using a rotating electromagnetic filter |
John H. Keller |
2000-02-22 |
| 5866985 |
Stable matching networks for plasma tools |
John H. Keller |
1999-02-02 |
| 5767628 |
Helicon plasma processing tool utilizing a ferromagnetic induction coil with an internal cooling channel |
John H. Keller |
1998-06-16 |
| 5543184 |
Method of reducing particulates in a plasma tool through steady state flows |
Michael Barnes, John C. Forster, John H. Keller, Thomas E. Wicker |
1996-08-06 |
| 5518547 |
Method and apparatus for reducing particulates in a plasma tool through steady state flows |
Michael Barnes, John C. Forster, John H. Keller, Thomas E. Wicker |
1996-05-21 |
| 5433258 |
Gettering of particles during plasma processing |
Michael Barnes, John C. Forster, John H. Keller, James A. O'Neill |
1995-07-18 |
| 5332441 |
Apparatus for gettering of particles during plasma processing |
Michael Barnes, John C. Forster, John H. Keller, James A. O'Neill |
1994-07-26 |
| 5304279 |
Radio frequency induction/multipole plasma processing tool |
John H. Keller |
1994-04-19 |
| 5241245 |
Optimized helical resonator for plasma processing |
Michael Barnes, JOHN FORSTER, John H. Keller |
1993-08-31 |
| 5207437 |
Ceramic electrostatic wafer chuck |
Michael Barnes, John C. Forster, John H. Keller |
1993-05-04 |
| 5206516 |
Low energy, steered ion beam deposition system having high current at low pressure |
John H. Keller |
1993-04-27 |
