Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8518184 | Methods and systems for controlling temperature during microfeature workpiece processing, E.G., CVD deposition | Kevin L. Beaman, Trung T. Doan, Lyle Breiner, Ronald A. Weimer, Er-Xuan Ping +2 more | 2013-08-27 |
| 8384192 | Methods for forming small-scale capacitor structures | Lingyi A. Zheng, Trung T. Doan, Lyle Breiner, Er-Xuan Ping, Kevin L. Beaman +2 more | 2013-02-26 |
| 7906393 | Methods for forming small-scale capacitor structures | Lingyi A. Zheng, Trung T. Doan, Lyle Breiner, Er-Xuan Ping, Kevin L. Beaman +2 more | 2011-03-15 |
| 7771537 | Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition | Kevin L. Beaman, Trung T. Doan, Lyle Breiner, Ronald A. Weimer, Er-Xuan Ping +2 more | 2010-08-10 |
| 7647886 | Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers | Trung T. Doan, Lyle Breiner, Ronald A. Weimer, Kevin L. Beaman, Er-Xuan Ping +2 more | 2010-01-19 |
| 7422635 | Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces | Lingyi A. Zheng, Trung T. Doan, Lyle Breiner, Er-Xuan Ping, Kevin L. Beaman +2 more | 2008-09-09 |
| 7344755 | Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers | Kevin L. Beaman, Ronald A. Weimer, Lyle Breiner, Er-Xuan Ping, Trung T. Doan +2 more | 2008-03-18 |
| 7279398 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | Cem Basceri, Trung T. Doan, Ronald A. Weimer, Kevin L. Beaman, Lyle Breiner +3 more | 2007-10-09 |
| 7258892 | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition | Kevin L. Beaman, Trung T. Doan, Lyle Breiner, Ronald A. Weimer, Er-Xuan Ping +2 more | 2007-08-21 |
| 7235138 | Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces | Lingyi A. Zheng, Trung T. Doan, Lyle Breiner, Er-Xuan Ping, Ronald A. Weimer +2 more | 2007-06-26 |
| 7056806 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | Cem Basceri, Trung T. Doan, Ronald A. Weimer, Kevin L. Beaman, Lyle Breiner +3 more | 2006-06-06 |
| 6758911 | Apparatus and process of improving atomic layer deposition chamber performance | Philip Campbell | 2004-07-06 |
| 6716284 | Apparatus and process of improving atomic layer deposition chamber performance | Philip Campbell | 2004-04-06 |
| 6461436 | Apparatus and process of improving atomic layer deposition chamber performance | Philip Campbell | 2002-10-08 |
| 6458714 | Method of selective oxidation in semiconductor manufacture | Don Powell, Ron Weimer, Lyle Breiner, Howard Rhodes, Jeff McKee | 2002-10-01 |
| 5409587 | Sputtering with collinator cleaning within the sputtering chamber | Gurtej S. Sandhu, Sung-Cheol Kim | 1995-04-25 |