Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10584415 | Temperature controlled showerhead | Henner Meinhold, Stephen Yu-Hong Lau, Vince Wilson, Easwar Srinivasan | 2020-03-10 |
| 10221484 | Temperature controlled showerhead | Henner Meinhold, Stephen Yu-Hong Lau, Vince Wilson, Easwar Srinivasan | 2019-03-05 |
| 9476120 | Temperature controlled showerhead | Henner Meinhold, Stephen Yu-Hong Lau, Vince Wilson, Easwar Srinivasan | 2016-10-25 |
| 8673080 | Temperature controlled showerhead | Henner Meinhold, Stephen Yu-Hong Lau, Vince Wilson, Easwar Srinivasan | 2014-03-18 |
| 8137467 | Temperature controlled showerhead | Henner Meinhold, Stephen Yu-Hong Lau, Vince Wilson, Easwar Srinivasan | 2012-03-20 |
| 8100081 | Edge removal of films using externally generated plasma species | Jon Henri, Henner Meinhold, Christopher Gage | 2012-01-24 |