Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865489 | Substrate support chuck cooling for deposition chamber | Brian T. West, Vijay D. Parkhe, Robert T. Hirahara | 2018-01-09 |
| 9668373 | Substrate support chuck cooling for deposition chamber | Brian T. West, Vijay D. Parkhe, Robert T. Hirahara | 2017-05-30 |