Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10391526 | Electrostatic chuck cleaning fixture | Armen Avoyan, Hong Shih, Kennet Baylon | 2019-08-27 |
| 9623449 | Dielectric window cleaning apparatuses | Armen Avoyan, Hong Shih, John Daugherty | 2017-04-18 |
| 9505036 | Portable sonic particle removal tool with a chemically controlled working fluid | Armen Avoyan, Hong Shih, John Daugherty | 2016-11-29 |
| 9393666 | Adapter plate for polishing and cleaning electrodes | Catherine Zhou, Duane Outka, Hong Shih | 2016-07-19 |
| 9390895 | Gas injector particle removal process and apparatus | Armen Avoyan | 2016-07-12 |
| 9105676 | Method of removing damaged epoxy from electrostatic chuck | Hong Shih, Tuochuan Huang, Yan Fang, Neal Newton, Rish Chhatre | 2015-08-11 |