Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7160813 | Etch back process approach in dual source plasma reactors | Eddie Chiu, Mavis J. Chaboya, Yuh-Jia Su | 2007-01-09 |
| 6955177 | Methods for post polysilicon etch photoresist and polymer removal with minimal gate oxide loss | Eddie Chiu, Yuh-Jia Su, Wesley P. Graff | 2005-10-18 |