Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009430 | Method for gate stack formation and etching | Sergey Voronin, Christopher Catano, Sang Cheol Han, Shyam Sridhar, Yusuke Yoshida +1 more | 2024-06-11 |
| 11699741 | Metal-containing liner process | Yusuke Yoshida, Sergey Voronin, Alok Ranjan | 2023-07-11 |
| 11398386 | Plasma etch processes | Yusuke Yoshida, Sergey Voronin, Shyam Sridhar, Caitlin Philippi, Alok Ranjan | 2022-07-26 |
| 11133194 | Method for selective etching at an interface between materials | Sergey Voronin, Christopher Catano, Nicholas Joy, Alok Ranjan | 2021-09-28 |
| 10903077 | Methods to protect nitride layers during formation of silicon germanium nano-wires in microelectronic workpieces | Yusuke Yoshida, Christopher Catano, Nicholas Joy, Sergey Voronin | 2021-01-26 |
| 10811273 | Methods of surface restoration for nitride etching | Erdinc Karakas, Andrew Nolan, Sergey Voronin, Alok Ranjan | 2020-10-20 |
| 10529540 | Advanced methods for plasma systems operation | Sergey Voronin, Alok Ranjan | 2020-01-07 |
| 10529589 | Method of plasma etching of silicon-containing organic film using sulfur-based chemistry | Erdinc Karakas, Li Wang, Andrew Nolan, Shyam Sridhar, Alok Ranjan +1 more | 2020-01-07 |
| 10490404 | Method of in situ hard mask removal | Andrew Nolan, Mingmei Wang, Alok Ranjan | 2019-11-26 |
| 10204832 | Method of patterning intersecting structures | Sergey Voronin, Alok Ranjan | 2019-02-12 |