Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10884236 | Optical device, projection optical system, exposure apparatus using the same, and method for manufacturing article | — | 2021-01-05 |
| 9568729 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article | Kohei Imoto | 2017-02-14 |
| 9557560 | Mirror unit and exposure apparatus | — | 2017-01-31 |
| 9465294 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article | — | 2016-10-11 |
| 7771065 | Optical unit and exposure apparatus having the same | Shigeo Sakino, Katsumi Asada, Hirohito Ito, Shinji Uchida | 2010-08-10 |
| 7453623 | Reflecting mirror and exposure apparatus using the same | Shinji Uchida, Katsumi Asada, Hirohito Ito, Shigeo Sakino | 2008-11-18 |
| 7443619 | Optical element holding apparatus, exposure apparatus and device manufacturing method | Shigeo Sakino, Hirohito Ito, Shinji Uchida, Katsumi Asada | 2008-10-28 |
| 7232257 | Hydrostatic bearing and stage apparatus using same | — | 2007-06-19 |
| 7207720 | Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method | Kotaro Akutsu | 2007-04-24 |
| 6658083 | Weight compensation apparatus, stage apparatus using the same, and exposure apparatus | — | 2003-12-02 |