Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8372205 | Reducing electrostatic charge by roughening the susceptor | Soo Young Choi, Beom Soo Park, Quanyuan Shang, John M. White, Dong-Kil Yim | 2013-02-12 |
| 7732010 | Method for supporting a glass substrate to improve uniform deposition thickness | Soo Young Choi, Beom Soo Park, Quanyuan Shang, Robert I. Greene, John M. White +2 more | 2010-06-08 |
| 7589031 | Method of avoiding haze formation on surfaces of silicon-containing PECVD-deposited thin films | Suhail Anwar, Beom Soo Park, Han Byoul Kim, Soo Young Choi, John M. White | 2009-09-15 |
| 7514936 | Detection and suppression of electrical arcing | Suhail Anwar, Remegio Manacio, Dong-Kil Yim, Soo Young Choi | 2009-04-07 |
| 7292045 | Detection and suppression of electrical arcing | Suhail Anwar, Remegio Manacio, Dong-Kil Yim, Soo Young Choi | 2007-11-06 |