Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12124169 | Nozzle standby port, apparatus for treating substrate including the same and method for cleaning nozzle using the same | Sang Eun NOH, Ki Sang EUM | 2024-10-22 |
| 12055866 | Cleaning jig, substrate treating apparatus including the same, cleaning method of substrate treating apparatus | Kisang Eum, Sang Eun NOH | 2024-08-06 |
| 11845090 | Nozzle apparatus, apparatus and method for treating substrate | Woo Sin JUNG, UnKyu KANG | 2023-12-19 |
| 8113141 | Apparatus for processing a substrate | — | 2012-02-14 |
| 8113142 | Apparatus for processing a substrate | — | 2012-02-14 |
| 8115142 | Plate, apparatus for adjusting temperature of substrate having the plate and apparatus for processing substrate having the plate | Hyun Kyung Kim | 2012-02-14 |