Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11302525 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Hiroaki Takahashi, Masayuki OTSUJI, Hiroshi Abe, Hitoshi Nakai +1 more | 2022-04-12 |
| 11101147 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Hiroaki Takahashi, Masayuki OTSUJI, Manabu OKUTANI, Hiroshi Abe +2 more | 2021-08-24 |
| 10530154 | Control apparatus | — | 2020-01-07 |
| 10074980 | Control apparatus | — | 2018-09-11 |