Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8906164 | Methods for stabilizing contact surfaces of electrostatic chucks | Tom Stevenson, Peter Muraoka | 2014-12-09 |
| 7829468 | Method and apparatus to detect fault conditions of plasma processing reactor | Douglas Keil, Eric A. Hudson, Andreas Fischer | 2010-11-09 |