Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195845 | Conditioning treatment for ALD productivity | Lu Chen | 2025-01-14 |
| 11566324 | Conditioning treatment for ALD productivity | Lu Chen | 2023-01-31 |
| 11270911 | Doping of metal barrier layers | Lu Chen, Gang Shen, Feng Chen, Tae Hong Ha, Xianmin Tang | 2022-03-08 |