Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887881 | Lithographic apparatus, substrate table, and non-uniform coating method | Ping Zhou, Elizabeth Stone, David Hart PETERSON, Mehmet Ali AKBAS, Ryan Mayer +1 more | 2024-01-30 |
| 10719019 | Substrate holder and a method of manufacturing a substrate holder | Thomas POIESZ, Satish Achanta, Mehmet Ali AKBAS, Pavlo ANTONOV, Jeroen BOUWKNEGT +4 more | 2020-07-21 |
| 5440390 | Optical fiber polarimeter | — | 1995-08-08 |