| 11541504 |
Recycled polishing pad |
Pal-Kon Kim, Young Jun Yoo, Si Hyeong Kim, Yoon Ho Kim, Jin-Ok Moon +1 more |
2023-01-03 |
| 9458280 |
Polishing pad compound |
Youngjun Jang, Jin Su Jeong, Jungsik Choi |
2016-10-04 |
| 9333467 |
Apparatus for manufacturing polishing pad and method of manufacturing polishing pad using the same |
Youngjun Jang, Jin Su Jeong, Jungsik Choi |
2016-05-10 |
| 8007676 |
Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions |
Jae-Hyun So, Sung-Taek Moon, Dong-Jun Lee, Nam-Soo Kim, Kyoung-Moon Kang |
2011-08-30 |
| 7578727 |
Conditioner device for conditioning polishing pad and chemical mechanical polishing apparatus including the same |
Sung Tae MOON, Dong-Jun Lee, Kyoung-Moon Kang, Nam-Soo Kim |
2009-08-25 |
| 7402261 |
Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions |
Jae-Hyun So, Sung-Taek Moon, Dong-Jun Lee, Nam-Soo Kim, Kyoung-Moon Kang |
2008-07-22 |
| 7261621 |
Pad conditioner for chemical mechanical polishing apparatus |
Sung-Taok Moon, Dong-Jun Lee, Jae-Hyun So, Kyoung-Moon Kang |
2007-08-28 |
