Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11541504 | Recycled polishing pad | Bong-Su Ahn, Pal-Kon Kim, Young Jun Yoo, Si Hyeong Kim, Yoon Ho Kim +1 more | 2023-01-03 |
| 7101271 | Polishing head and chemical mechanical polishing apparatus | — | 2006-09-05 |
| 6458023 | Multi characterized chemical mechanical polishing pad and method for fabricating the same | — | 2002-10-01 |
| 6334810 | Chemical mechanical polishing apparatus and method of using the same | Ju-Hun Song | 2002-01-01 |