| 10770339 |
Automated replacement of consumable parts using interfacing chambers |
Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Derek John Witkowicki |
2020-09-08 |
| 10707113 |
End effector assembly for clean/dirty substrate handling |
Ross Embertson, Brandon Senn, Matthew J. Rodnick |
2020-07-07 |
| 10427307 |
Automated replacement of consumable parts using end effectors interfacing with plasma processing system |
Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Derek John Witkowicki |
2019-10-01 |
| 10304717 |
Automated replacement of consumable parts using interfacing chambers |
Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Derek John Witkowicki |
2019-05-28 |
| 10124492 |
Automated replacement of consumable parts using end effectors interfacing with plasma processing system |
Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Derek John Witkowicki |
2018-11-13 |
| 10062590 |
Front opening ring pod |
Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould +1 more |
2018-08-28 |
| 10062599 |
Automated replacement of consumable parts using interfacing chambers |
Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Derek John Witkowicki |
2018-08-28 |
| 10062589 |
Front opening ring pod |
Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould +1 more |
2018-08-28 |
| 9881820 |
Front opening ring pod |
Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould +1 more |
2018-01-30 |
| 9779977 |
End effector assembly for clean/dirty substrate handling |
Ross Embertson, Brandon Senn, Matthew J. Rodnick |
2017-10-03 |
