Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7652758 | Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systems | Sangbong Park, Jang Fung Chen | 2010-01-26 |
| 7355673 | Method, program product and apparatus of simultaneous optimization for NA-Sigma exposure settings and scattering bars OPC using a device layout | Duan-Fu Stephen Hsu | 2008-04-08 |
| 7116411 | Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systems | Sangbong Park, Jang Fung Chen | 2006-10-03 |
| 7034919 | Method and apparatus for providing lens aberration compensation by illumination source optimization | — | 2006-04-25 |
| 6738859 | Method and apparatus for fast aerial image simulation | — | 2004-05-18 |