Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7361608 | Method and system for forming a feature in a high-k layer | Akiteru Ko, Lee Chen | 2008-04-22 |
| 7172969 | Method and system for etching a film stack | Hiromasa Mochiki, Arpan Mahorowala | 2007-02-06 |