Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6139483 | Method of forming lateral resonant tunneling devices | Alan C. Seabaugh, Yung-Chung Kao, John N. Randall | 2000-10-31 |
| 5952059 | Forming a piezoelectric layer with improved texture | Edward A. Beam, III | 1999-09-14 |
| 5935641 | Method of forming a piezoelectric layer with improved texture | Edward A. Beam, III | 1999-08-10 |
| 5556462 | Growth method by repeatedly measuring flux in MBE chamber | Francis G. Celii, Yung-Chung Kao | 1996-09-17 |
| 5399521 | Method of semiconductor layer growth by MBE | Francis G. Celii, Yung-Chung Kao | 1995-03-21 |
| 5175019 | Method for depositing a thin film | Francis G. Celli | 1992-12-29 |
| 5170329 | Stress free chip mount and method of manufacture | — | 1992-12-08 |
| 5114696 | Diamond growth method | — | 1992-05-19 |
| 5082522 | Method for forming patterned diamond thin films | Francis G. Celii | 1992-01-21 |
| 5006203 | Diamond growth method | — | 1991-04-09 |
| 4878989 | Chemical beam epitaxy system | — | 1989-11-07 |
| 4830984 | Method for heteroepitaxial growth using tensioning layer on rear substrate surface | — | 1989-05-16 |
| 4699085 | Chemical beam epitaxy system | — | 1987-10-13 |
| 4681653 | Planarized dielectric deposited using plasma enhanced chemical vapor deposition | Gregory C. Smith | 1987-07-21 |
| 4521275 | Plasma etch chemistry for anisotropic etching of silicon | — | 1985-06-04 |
| 4512283 | Plasma reactor sidewall shield | Thomas D. Bonifield | 1985-04-23 |
| 4513021 | Plasma reactor with reduced chamber wall deposition | Thomas D. Bonifield | 1985-04-23 |
| 4450042 | Plasma etch chemistry for anisotropic etching of silicon | — | 1984-05-22 |