Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7581511 | Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes | Santiago Rodriguez | 2009-09-01 |
| 7481887 | Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces | Craig M. Carpenter, Ross S. Dando | 2009-01-27 |
| 7468104 | Chemical vapor deposition apparatus and deposition method | Philip Campbell, Craig M. Carpenter, Randy Mercil, Sujit Sharan | 2008-12-23 |
| 7431225 | Methods of operating a liquid vaporizer | Ross S. Dando, Raynald Cantin, Gurtej S. Sandhu | 2008-10-07 |
| 7387685 | Apparatus and method for depositing materials onto microelectronic workpieces | Craig M. Carpenter, Ross S. Dando, Kimberly Tschepen, Garo Derderian | 2008-06-17 |
| 7329292 | Process byproduct trap and system including same | Philip Campbell | 2008-02-12 |
| 7311947 | Laser assisted material deposition | Ross S. Dando, Dan Gealy, Craig M. Carpenter, Philip Campbell | 2007-12-25 |
| 7270715 | Chemical vapor deposition apparatus | Ross S. Dando, Craig M. Carpenter, Philip Campbell | 2007-09-18 |
| 7255128 | System and method for detecting flow in a mass flow controller | Gurtej S. Sandhu, Sujit Sharan, Neal R. Rueger | 2007-08-14 |
| 7234412 | Semiconductor substrate deposition processor chamber liner apparatus | Craig M. Carpenter, Ross S. Dando, Philip Campbell, Gurtej S. Sandhu | 2007-06-26 |
| 7229666 | Chemical vapor deposition method | Philip Campbell, Craig M. Carpenter, Randy Mercil, Sujit Sharan | 2007-06-12 |
| 7192487 | Semiconductor substrate processing chamber and accessory attachment interfacial structure | Craig M. Carpenter, Ross S. Dando, Kevin Hamer, Raynald Cantin, Philip Campbell +2 more | 2007-03-20 |
| 7185601 | Chemically sensitive warning apparatus and method | Craig M. Carpenter, Philip Campbell, Ross S. Dando | 2007-03-06 |
| 7118783 | Methods and apparatus for vapor processing of micro-device workpieces | Craig M. Carpenter, Ross S. Dando, Dan Gealy, Garo Derderian | 2006-10-10 |
| 7114669 | Methods of operating a liquid vaporizer | Ross S. Dando, Raynald Cantin, Gurtej S. Sandhu | 2006-10-03 |
| 7114404 | System and method for detecting flow in a mass flow controller | Gurtej S. Sandhu, Sujit Sharan, Neal R. Rueger | 2006-10-03 |
| 7044997 | Process byproduct trap, methods of use, and system including same | Philip Campbell | 2006-05-16 |
| 7000636 | Valve assemblies for use with a reactive precursor in semiconductor processing | Ross S. Dando, Gurtej S. Sandhu | 2006-02-21 |
| 6997403 | Liquid vaporizer with positive liquid shut-off | Ross S. Dando, Raynald Cantin, Gurtej S. Sandhu | 2006-02-14 |
| 6935372 | Semiconductor processing reactive precursor valve assembly | Ross S. Dando, Gurtej S. Sandhu | 2005-08-30 |
| 6936547 | Gas delivery system for deposition processes, and methods of using same | Weimin Li, Neal R. Rueger, Li Li, Ross S. Dando, Kevin Hamer | 2005-08-30 |
| 6858264 | Chemical vapor deposition methods | Ross S. Dando, Philip Campbell, Craig M. Carpenter | 2005-02-22 |
| 6838114 | Methods for controlling gas pulsing in processes for depositing materials onto micro-device workpieces | Craig M. Carpenter, Ross S. Dando | 2005-01-04 |
| 6821347 | Apparatus and method for depositing materials onto microelectronic workpieces | Craig M. Carpenter, Ross S. Dando, Kimberly Tschepen, Garo Derderian | 2004-11-23 |
| 6814813 | Chemical vapor deposition apparatus | Ross S. Dando, Craig M. Carpenter, Philip Campbell | 2004-11-09 |