Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6508062 | Thermal exchanger for a wafer chuck | — | 2003-01-21 |
| 6258227 | Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck | — | 2001-07-10 |
| 6081414 | Apparatus for improved biasing and retaining of a workpiece in a workpiece processing system | Michael Sugarman | 2000-06-27 |
| D425919 | Electrostatic chuck with improved spacing mask and workpiece detection device | Vincent E. Burkhart, Steven V. Sansoni | 2000-05-30 |
| 6053756 | Interlock safety device | Vince Burkhart | 2000-04-25 |
| 6051122 | Deposition shield assembly for a semiconductor wafer processing system | — | 2000-04-18 |
| D420023 | Electrostatic chuck with improved spacing mask and workpiece detection device | Steven V. Sansoni, Vincent E. Burkhart | 2000-02-01 |
| D420022 | Electrostatic chuck with improved spacing and charge migration reduction mask | Vincent E. Burkhart, Steven V. Sansoni | 2000-02-01 |
| D407073 | Electrostatic chuck with improved spacing and charge migration reduction mask | Vincent E. Burkhart, Steven V. Sansoni | 1999-03-23 |
| D406852 | Electrostatic chuck with improved spacing mask and workpiece detection device | Vincent E. Burkhart, Steven V. Sansoni | 1999-03-16 |
| 5863396 | Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck | — | 1999-01-26 |
| 5863340 | Deposition ring anti-rotation apparatus | — | 1999-01-26 |