| 8859993 |
Sample holder of electron beam exposure apparatus and electron beam exposure method using the same |
Hirofumi Hayakawa |
2014-10-14 |
| 8779378 |
Electron beam detector, electron beam processing apparatus, and method of manufacturing electron beam detector |
Kenji Abe, Masaki Kurokawa, Hideki Nasuno |
2014-07-15 |
| 8420300 |
Method of producing multilayer printed wiring board and photosensitive dry film used therefor |
— |
2013-04-16 |
| 8356404 |
Method of producing multilayer printed wiring board and photosensitive dry film used therefor |
— |
2013-01-22 |
| 7894203 |
Multilayer printed wiring board |
Takashi Kariya |
2011-02-22 |
| 6046459 |
Method and system for charged particle beam exposure |
Nobuyuki Yasutake, Yoshihisa Ooae, Kazushi Ishida, Hiroshi Yasuda, Hitoshi Tanaka |
2000-04-04 |
| 5981118 |
Method for charged particle beam exposure with fixed barycenter through balancing stage scan |
Nobuyuki Yasutake, Yoshihisa Ooae, Kazushi Ishida, Hiroshi Yasuda, Hitoshi Tanaka |
1999-11-09 |
| 5966200 |
Charged particle beam exposure apparatus |
Kenichi Kawakami, Tatsuro Ohkawa, Kazushi Ishida |
1999-10-12 |
