Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8859993 | Sample holder of electron beam exposure apparatus and electron beam exposure method using the same | Akiyoshi Tsuda | 2014-10-14 |
| 8223410 | Imaging device and method of processing imaging result in imaging device | Masafumi Wakazono, Koichiro Ishigami, Takami Mizukura, Naoya Katoh, Miyuki Okada | 2012-07-17 |
| 7394640 | Electrostatic chuck and substrate fixing method using the same | — | 2008-07-01 |
| 7321685 | Image processing device, image processing method, and image capturing device | Miyuki Okada | 2008-01-22 |