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Overlay correcting method, and photolithography method, semiconductor device manufacturing method and scanner system based on the overlay correcting method |
Jeongjin Lee, Minseok Kang, Seungyoon Lee |
2024-03-05 |
| 11537042 |
Overlay correcting method, and photolithography method, semiconductor device manufacturing method and scanner system based on the overlay correcting method |
Jeongjin Lee, Minseok Kang, Seungyoon Lee |
2022-12-27 |
| 11456222 |
Overlay correction method and semiconductor fabrication method including the same |
Woo Yong Jung, Jinsun KIM, Seungyoon Lee, Jeongjin Lee |
2022-09-27 |
| 11422455 |
EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the same |
Doogyu Lee, Seungyoon Lee, Jeongjin Lee |
2022-08-23 |
| 11137673 |
EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the same |
Doogyu Lee, Seungyoon Lee, Jeongjin Lee |
2021-10-05 |
| 10566252 |
Overlay-correction method and a control system using the same |
Seungyoon Lee |
2020-02-18 |
| 10444276 |
Computing device executing program performing method of analyzing power noise in semiconductor device, semiconductor device design method, and program storage medium storing program |
Young-Hoe Cheon |
2019-10-15 |
| 10198541 |
Circuit modeling system and circuit modeling method based on net list simplification technique |
Soo-Yung Ahn, Young-Hoe Cheon |
2019-02-05 |
| 10119811 |
Alignment mark, method of measuring wafer alignment, and method of manufacturing a semiconductor device using the method of measuring wafer alignment |
Seung Yoon Lee, Jeong Jin Lee |
2018-11-06 |
| 9958495 |
Computing device executing program performing method of analyzing power noise in semiconductor device, semiconductor device design method, and program storage medium storing program |
Young-Hoe Cheon |
2018-05-01 |
| 9747682 |
Methods for measuring overlays |
Jeongjin Lee, Seungyoon Lee |
2017-08-29 |
| 9465900 |
System and method for designing semiconductor package using computing system, apparatus for fabricating semiconductor package including the system, and semiconductor package designed by the method |
Jae-hoon Jeong, Won Cheol LEE, Young-Hoe Cheon, Bo-Sun Hwang |
2016-10-11 |
| 9281250 |
Method of detecting an asymmetric portion of an overlay mark and method of measuring an overlay including the same |
Seung Hwa Oh, Jeong Jin Lee |
2016-03-08 |
| 7799490 |
Optical masks and methods for measuring aberration of a beam |
Suk-Joo Lee, Han-ku Cho, Sang-Gyun Woo |
2010-09-21 |
| 7670725 |
Optical masks and methods for measuring aberration of a beam |
Suk-Joo Lee, Han-ku Cho, Sang-Gyun Woo |
2010-03-02 |
| 6539528 |
Methods, systems, and computer program products for designing an integrated circuit that use an information repository having circuit block layout information |
Yong Jin Lee, Dae Hee Lee, Jong-Bae Lee |
2003-03-25 |
