Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846359 | Diffraction-based overlay marks and methods of overlay measurement | Seung Yoon Lee, Jeong Jin Lee | 2017-12-19 |
| 9281250 | Method of detecting an asymmetric portion of an overlay mark and method of measuring an overlay including the same | Jeong Jin Lee, Chan Hwang | 2016-03-08 |