Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4657618 | Powered load lock electrode/substrate assembly including robot arm, optimized for plasma process uniformity and rate | John E. Spencer, Randall E. Johnson, Dan Hockersmith, Randall C. Hildenbrand, John I. Jones | 1987-04-14 |