Issued Patents All Time
Showing 51–71 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8692340 | MEMS acoustic sensor with integrated back cavity | Erhan Polatkan Ata, Xiang Li, Stephen Lloyd, Michael Julian Daneman | 2014-04-08 |
| 8686555 | Integrated heater on MEMS cap for wafer scale packaged MEMS sensors | Goksen G. Yaralioglu | 2014-04-01 |
| 8564076 | Internal electrical contact for enclosed MEMS devices | Kegang Huang, Jongwoo Shin, Michael Julian Daneman, Joseph Seeger | 2013-10-22 |
| 8513747 | Integrated MEMS devices with controlled pressure environments by means of enclosed volumes | Kegang Huang, Steven S. Nasiri | 2013-08-20 |
| 8395381 | Micromachined magnetic field sensors | Chiung C. Lo, Joseph Seeger | 2013-03-12 |
| 8384134 | MEMS device including an electrical interconnect through a substrate | Michael Julian Daneman, Steven S. Nasiri | 2013-02-26 |
| 8350346 | Integrated MEMS devices with controlled pressure environments by means of enclosed volumes | Kegang Huang, Steven S. Nasiri | 2013-01-08 |
| 7458263 | Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging | Steven S. Nasiri, Joseph Seeger, Anthony Flannery, Alexander Castro | 2008-12-02 |
| 7250353 | Method and system of releasing a MEMS structure | Steven S. Nasiri, Anthony Flannery | 2007-07-31 |
| 6865313 | Bistable latching actuator for optical switching applications | Minyao Mao, Robert Ostrom | 2005-03-08 |
| 6633708 | Micromachined apparatus and technique to align two dimensional fiber array | — | 2003-10-14 |
| 6549107 | Latching mechanism for MEMS actuator and method of fabrication | Robert Fan, Long Que | 2003-04-15 |
| 6477290 | Fiber optic switch using MEMS | Lawrence A. Wan | 2002-11-05 |
| 6189381 | Angular rate sensor made from a structural wafer of single crystal silicon | Yongli Huang, Tariq M. Haniff, Weijie Yun | 2001-02-20 |
| 6187211 | Method for fabrication of multi-step structures using embedded etch stop layers | Donald L. Smith, James C. Mikkelsen, Babur B. Hadimioglu | 2001-02-13 |
| 6010461 | Monolithic silicon intra-ocular pressure sensor and method therefor | Tariq M. Haniff, Yongli Huang, Kevin Montegrande | 2000-01-04 |
| 5821958 | Acoustic ink printhead with variable size droplet ejection openings | — | 1998-10-13 |
| 5631678 | Acoustic printheads with optical alignment | Babur B. Hadimioglu | 1997-05-20 |
| 5565113 | Lithographically defined ejection units | Babur B. Hadimioglu, Calvin F. Quate, Scott A. Elrod, Eric G. Rawson | 1996-10-15 |
| 5467975 | Apparatus and method for moving a substrate | Babur B. Hadimioglu, Richard G. Stearns, Calvin F. Quate | 1995-11-21 |
| 5428381 | Capping structure | Babur B. Hadimioglu | 1995-06-27 |