Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387827 | Method for growing thin silicon oxides on a silicon substrate using chlorine precursors | Michael J. McGeary, Hessel Sprey, Karine Kenis, Marc Schaekers, Marc Heyns | 2002-05-14 |
| 6334902 | Method and apparatus for removing a liquid from a surface | Marc Meuris, Marc Heyns | 2002-01-01 |
| 6322598 | Semiconductor processing system for processing discrete pieces of substrate to form electronic devices | Marc Meuris, Marc Heyns | 2001-11-27 |
| 6303522 | Oxidation in an ambient comprising ozone and the reaction products of an organic chloro-carbon precursor | Marc Heyns | 2001-10-16 |
| 6261377 | Method of removing particles and a liquid from a surface of substrate | Mark Meuris, Marc Heyns | 2001-07-17 |
| 6247481 | Apparatus and method for wet cleaning or etching a flat substrate | Marc Meuris, Marc Heyns | 2001-06-19 |
| 5712168 | Method for evaluating, monitoring or controlling the efficiency, stability, or exhaustion of a complexing or chelating agent present in a chemical solution used for oxidizing, dissolving, etching or stripping a semiconductor wafer | Harald Schmidt, Martien Johanna Maria Godelieve Bernard Baeyens, Marc Heyns | 1998-01-27 |