Issued Patents All Time
Showing 51–75 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967548 | Microelectromechanical (MEMS) switching apparatus | Qing Ma, John Heck, Li-Peng Wang, Dong-sik Shim, Quan Tran | 2005-11-22 |
| 6943419 | Hermetically packaging a microelectromechanical switch and a film bulk acoustic resonator | Daniel ManHung Wong, John Heck | 2005-09-13 |
| 6943648 | Methods for forming a frequency bulk acoustic resonator with uniform frequency utilizing multiple trimming layers and structures formed thereby | Jose Maiz, Li-Peng Wang, Qing Ma | 2005-09-13 |
| 6940367 | Forming film bulk acoustic resonator filters | Qing Ma, Li-Peng Wang | 2005-09-06 |
| 6903452 | Packaging microelectromechanical structures | Qing Ma, Li-Peng Wang, John Heck, Quan Tran | 2005-06-07 |
| 6861783 | Structure to achieve high-Q and low insertion loss film bulk acoustic resonators | Li-Peng Wang, Qing Ma | 2005-03-01 |
| 6852492 | Nucleic acid sequencing by raman monitoring of uptake of precursors during molecular replication | Andrew Berlin, Steven J. Kirch, Gabi Neubauer, Mineo Yamakawa | 2005-02-08 |
| 6852926 | Packaging microelectromechanical structures | Qing Ma, John Heck, Daniel ManHung Wong, Michele Berry | 2005-02-08 |
| 6822535 | Film bulk acoustic resonator structure and method of making | Qing Ma, Li-Peng Wang | 2004-11-23 |
| 6816035 | Forming film bulk acoustic resonator filters | Qing Ma, Li-Peng Wang | 2004-11-09 |
| 6812814 | Microelectromechanical (MEMS) switching apparatus | Qing Ma, John Heck, Li-Peng Wang, Dong-sik Shim, Quan Tran | 2004-11-02 |
| 6808954 | Vacuum-cavity MEMS resonator | Qing Ma, Peng Cheng | 2004-10-26 |
| 6787970 | Tuning of packaged film bulk acoustic resonator filters | Dong-sik Shim, Jose Maiz, Li-Peng Wang, Qing Ma | 2004-09-07 |
| 6753639 | Micro-electromechanical structure resonator frequency adjustment using radiant energy trimming and laser/focused ion beam assisted deposition | Qing Ma, Peng Cheng | 2004-06-22 |
| 6713314 | Hermetically packaging a microelectromechanical switch and a film bulk acoustic resonator | Daniel ManHung Wong, John Heck | 2004-03-30 |
| 6706981 | Techniques to fabricate a reliable opposing contact structure | Qing Ma, Kramadhati V. Ravi | 2004-03-16 |
| 6686820 | Microelectromechanical (MEMS) switching apparatus | Qing Ma, John Heck, Li-Peng Wang, Dong-sik Shim, Quan Tran | 2004-02-03 |
| 6673697 | Packaging microelectromechanical structures | Qing Ma, Li-Peng Wang, John Heck, Quan Tran | 2004-01-06 |
| 6662419 | Method for fabricating film bulk acoustic resonators to achieve high-Q and low loss | Li-Peng Wang, Qing Ma | 2003-12-16 |
| 6650204 | Resonator frequency correction by modifying support structures | Qing Ma, Peng Cheng | 2003-11-18 |
| 6621137 | MEMS device integrated chip package, and method of making same | Qing Ma, Peng Cheng | 2003-09-16 |
| 6621022 | Reliable opposing contact structure | Qing Ma, Kramadhati V. Ravi | 2003-09-16 |
| 6593672 | MEMS-switched stepped variable capacitor and method of making same | Qing Ma, Peng Cheng | 2003-07-15 |
| 6587605 | Method and apparatus for providing optical interconnection | Mario Paniccia, Michael T. Morse | 2003-07-01 |
| 6573822 | Tunable inductor using microelectromechanical switches | Qing Ma, Peng Cheng | 2003-06-03 |