Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7214995 | Mechanism to prevent actuation charging in microelectromechanical actuators | Quan Tran | 2007-05-08 |
| 7170155 | MEMS RF switch module including a vertical via | John Heck, Joseph Hayden | 2007-01-30 |
| 7042308 | Mechanism to prevent self-actuation in a microelectromechanical switch | — | 2006-05-09 |
| 6942750 | Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication | Khalil Najafi, Luis P. Bernal, Peter D. Washabaugh | 2005-09-13 |
| 6812810 | Bridges for microelectromechanical structures | Qing Ma | 2004-11-02 |
| 6809617 | Edge plated transmission line and switch integrally formed therewith | Qing Ma, Joseph Hayden, Quan Tran | 2004-10-26 |