Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10563642 | Modular stacked variable-compression micropump and method of making same | Khalil Najafi, Seyed Amin Sandoughsaz Zardini, Ali Besharatian | 2020-02-18 |
| 7008193 | Micropump assembly for a microgas chromatograph and the like | Khalil Najafi, Hanseup Kim, Aaron A. Astle, Peter D. Washabaugh | 2006-03-07 |
| 6942750 | Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication | Tsung-Kuan A. Chou, Khalil Najafi, Peter D. Washabaugh | 2005-09-13 |