Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7289198 | Process compensation for step and scan lithography | Alexander Starikov | 2007-10-30 |
| 7262070 | Method to make a weight compensating/tuning layer on a substrate | Krishna Seshan | 2007-08-28 |
| 7006208 | Defect compensation of lithography on non-planar surface | Alexander Starikov | 2006-02-28 |
| 6917047 | Methods and apparatuses for off-axis lithographic illumination | — | 2005-07-12 |
| 6703625 | Methods and apparatus for off-axis lithographic illumination | — | 2004-03-09 |