Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7369697 | Process variable of interest monitoring and control | — | 2008-05-06 |
| 7289198 | Process compensation for step and scan lithography | Theodore Doros | 2007-10-30 |
| 7006208 | Defect compensation of lithography on non-planar surface | Theodore Doros | 2006-02-28 |
| 6309809 | Multi-layer integrated imaging/image recording process with improved image tolerances | Douglas S. Goodman | 2001-10-30 |
| 5879866 | Image recording process with improved image tolerances using embedded AR coatings | Douglas S. Goodman | 1999-03-09 |
| 5276337 | Accuracy of alignment and O/L measurement systems by means of tunable source and handling of signal | — | 1994-01-04 |