Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Defect compensation of lithography on non-planar surface

Defect compensation of lithography on non-planar surface

US Patent 7006208 · Granted Feb 28, 2006

Estimated economic value: $11,249,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multi-sensor test device for quality control scanning2025
Process variable of interest monitoring and control2008
Process compensation for step and scan lithography2007
Process compensation for step and scan lithography2007
Method to make a weight compensating/tuning layer on a substrate2007
Methods and apparatuses for off-axis lithographic illumination2005
Methods and apparatus for off-axis lithographic illumination2004
Multi-layer integrated imaging/image recording process with improved image toler2001
Image recording process with improved image tolerances using embedded AR coating1999
Accuracy of alignment and O/L measurement systems by means of tunable source and1994