Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7049053 | Supercritical carbon dioxide to reduce line edge roughness | Vijayakumar Ramachandrarao, Hyun-Mog Park, Bob Turkot | 2006-05-23 |
| 7018938 | Controlled use of photochemically susceptible chemistries for etching, cleaning and surface conditioning | Justin K. Brask, Vijayakumar Ramachandrarao | 2006-03-28 |