Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7049053 | Supercritical carbon dioxide to reduce line edge roughness | Vijayakumar Ramachandrarao, Hyun-Mog Park, Subramanyam Iyer | 2006-05-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7049053 | Supercritical carbon dioxide to reduce line edge roughness | Vijayakumar Ramachandrarao, Hyun-Mog Park, Subramanyam Iyer | 2006-05-23 |