Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583068 | Enhanced inspection of extreme ultraviolet mask | Ted Liang, Guojing Zhang | 2003-06-24 |
| 6562522 | Photomasking | — | 2003-05-13 |
| 6479195 | Mask absorber for extreme ultraviolet lithography | Heinrich Kirchauer | 2002-11-12 |
| 6355381 | Method to fabricate extreme ultraviolet lithography masks | Mark Thiec-Hien Tran | 2002-03-12 |
| 6280886 | Clean-enclosure window to protect photolithographic mask | — | 2001-08-28 |
| 6197454 | Clean-enclosure window to protect photolithographic mask | — | 2001-03-06 |
| 5958629 | Using thin films as etch stop in EUV mask fabrication process | Guojing Zhang, Joseph C. Langston | 1999-09-28 |
| 5935737 | Method for eliminating final euv mask repairs in the reflector region | — | 1999-08-10 |
| 5928817 | Method of protecting an EUV mask from damage and contamination | Guojing Zhang | 1999-07-27 |
| 5303002 | Method and apparatus for enhancing the focus latitude in lithography | — | 1994-04-12 |