Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630273 | Method to fabricate extreme ultraviolet lithography masks | Pei-Yang Yan | 2003-10-07 |
| 6355381 | Method to fabricate extreme ultraviolet lithography masks | Pei-Yang Yan | 2002-03-12 |
| 6277765 | Low-K Dielectric layer and method of making same | Peng Cheng, Brian S. Doyle, Chien Chiang | 2001-08-21 |