Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7829852 | Device having etched feature with shrinkage carryover | Gary Cao, George Chen, Brandon L. Ward, Alan Wong | 2010-11-09 | $16,505,000 |
| 7285781 | Characterizing resist line shrinkage due to CD-SEM inspection | Gary Cao, George Chen, Brandon L. Ward, Alan Wong | 2007-10-23 | $18,637,000 |