Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7829852 | Device having etched feature with shrinkage carryover | Gary Cao, George Chen, Nancy J. Wheeler, Alan Wong | 2010-11-09 |
| 7285781 | Characterizing resist line shrinkage due to CD-SEM inspection | Gary Cao, George Chen, Nancy J. Wheeler, Alan Wong | 2007-10-23 |