Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6070550 | Apparatus for the stabilization of halogen-doped films through the use of multiple sealing layers | Maciek Orczyk | 2000-06-06 |
| 5952060 | Use of carbon-based films in extending the lifetime of substrate processing system components | — | 1999-09-14 |
| 5812362 | Method and apparatus for the use of diamond films as dielectric coatings on electrostatic chucks | — | 1998-09-22 |
| 5661093 | Method for the stabilization of halogen-doped films through the use of multiple sealing layers | Maciek Orczyk | 1997-08-26 |
| 5607723 | Method for making continuous thin diamond film | Linda S. Plano, Michael G. Peters, John M. Pinneo | 1997-03-04 |
| 5432003 | Continuous thin diamond film and method for making same | Linda S. Plano, Michael G. Peters, John M. Pinneo | 1995-07-11 |
| 5131963 | Silicon on insulator semiconductor composition containing thin synthetic diamone films | — | 1992-07-21 |