Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7156933 | Configuration and method for mounting a backing film to a polish head | Katrin Ebner, David P. Erdmann, Walter Glashauser | 2007-01-02 |
| 6739013 | Wafer cleaning apparatus | Walter Glashauser | 2004-05-25 |
| 6375549 | Polishing head for wafer, and method for polishing | Walter Glashauser, David Weston Haggart, Jr., Katrin Ebner | 2002-04-23 |