Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7156933 | Configuration and method for mounting a backing film to a polish head | David P. Erdmann, Walter Glashauser, Lutz Teichgräber | 2007-01-02 |
| 6824456 | Configuration for polishing disk-shaped objects | Walter Glashauser | 2004-11-30 |
| 6375549 | Polishing head for wafer, and method for polishing | Walter Glashauser, Lutz Teichgräber, David Weston Haggart, Jr. | 2002-04-23 |