Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269669 | Process for producing a multifunctional dielectric layer on a substrate | Markus Schwerd, Thomas Goebel, Andrea Mitchell, Heinrich Koerner, Martina Hommel | 2016-02-23 |
| 8367514 | Integrated circuit with capacitor and method for the production thereof | Thomas Goebel, Heinrich Körner, Andrea Mitchell, Markus Schwerd, Martin Seck +1 more | 2013-02-05 |
| 8148227 | Method for providing a self-aligned conductive structure | — | 2012-04-03 |
| 7964494 | Integrated connection arrangements | Stefan Drexl, Thomas Goebel, Martina Hommel, Wolfgang Klein, Heinrich Körner +3 more | 2011-06-21 |
| 7692266 | Integrated circuit with capacitor and method for the production thereof | Thomas Goebel, Heinrich Körner, Andrea Mitchell, Markus Schwerd, Martin Seck +1 more | 2010-04-06 |
| 7638434 | Method for filling a trench in a semiconductor product | — | 2009-12-29 |
| 7619309 | Integrated connection arrangements | Stefan Drexl, Thomas Goebel, Martina Hommel, Wolfgang Klein, Heinrich Körner +3 more | 2009-11-17 |
| 6940720 | Integrated circuit having a thermally shielded electric resistor trace | Armin Fischer, Heinrich Körner, Markus Schwerd, Wolfgang Walter, Alexander Von Glasow | 2005-09-06 |
| 5396184 | Method for the in situ identification of the sheet resistivity or, respectively, of process parameters of thin, electrically conductive layers manufactured under the influence of a plasma | E-Wolfgang Frank, Peter Kuecher | 1995-03-07 |