Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7709896 | ESD protection device and method | Cornelius Christian Russ, David Alvarez, Kiran V. Chatty, Robert J. Gauthier, JR., Martin Wendel | 2010-05-04 |
| 7678632 | MuGFET with increased thermal mass | Harald Gossner, Christian Russ, Thomas Schulz | 2010-03-16 |
| 7426012 | Exposure device for immersion lithography and method for monitoring parameters of an exposure device for immersion lithography | Sebastian Schmidt, Guillaume Roesch | 2008-09-16 |
| 7410732 | Process for producing a mask | Tarek Lutz | 2008-08-12 |
| 7097947 | Method for correcting local loading effects in the etching of photomasks | Martin Blöcker, Gerd Ballhorn | 2006-08-29 |
| 7087910 | Method for detecting and compensating for positional displacements in photolithographic mask units and apparatus for carrying out the method | Tarek Lutz | 2006-08-08 |
| 6799588 | Apparatus for treating substrates | Ulrich Speh, Marc Meuris | 2004-10-05 |
| 6110336 | High pressure magnetron cathode assembly and sputtering apparatus utilizing same | Roger Wordenweber, Georg J. Ockenfuss, Wilfried Klein | 2000-08-29 |